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MEMS [electronic resource] : design and fabrication / edited by Mohamed Gad-el-Hak.

Contributor(s): Gad-el-Hak, Mohamed, 1945-Material type: TextTextSeries: The MEMS handbook | Mechanical engineering series (Boca Raton, Fla.)Publication details: Boca Raton, FL : CRC/Taylor & Francis, 2006Edition: 2nd edDescription: 664 p. : illISBN: 9781420036565 (ebook : PDF)Subject(s): Microelectromechanical systems -- Design and construction | MicrofabricationGenre/Form: Electronic books.Additional physical formats: No titleOnline resources: Distributed by publisher. Purchase or institutional license may be required for access. Also available in print edition. CRC Press (http://www.crcpress.com)
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Item type Current library Call number Status Date due Barcode
Ebooks Ebooks Mysore University Main Library
Not for loan EBCP00491

One of three parts whose previous edition was a published as a single volume.

Includes bibliographical references and index.

Also available in print edition. CRC Press (http://www.crcpress.com)

Mode of access: World Wide Web.

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