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Microlithography [electronic resource] : science and technology / edited by Kazuaki Suzuki, Bruce W. Smith.

by Suzuki, Kazuaki | Smith, Bruce W, 1959-.

Series: Optical science and engineering (Boca Raton, Fla.) ; 126.Edition: 2nd ed.Material type: Text Text; Format: electronic available online remote; Literary form: Not fiction Publication details: Boca Raton : CRC Press, c2007Online access: Distributed by publisher. Purchase or institutional license may be required for access. Availability: Items available for reference: Mysore University Main Library Not for loan (1) .
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Materials and Processes for Next Generation Lithography.

by Robinson, Alex [editor.] | Lawson, Richard [editor.].

Series: Frontiers of nanoscience ; v. 11.Material type: Text Text; Format: available online remote; Literary form: Not fiction Publication details: Amsterdam, Netherlands : Elsevier, 2016Online access: ScienceDirect Availability: Items available for reference: Mysore University Main Library Not for loan (1) .
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