Design and Manufacturing of Active Microsystems [electronic resource] / edited by Stephanus Büttgenbach, Arne Burisch, Jürgen Hesselbach.
Material type: TextSeries: Microtechnology and MEMSPublication details: Berlin, Heidelberg : Springer Berlin Heidelberg, 2011ISBN: 9783642129032Subject(s): Engineering | Structural control (Engineering) | Nanotechnology | Engineering | Nanotechnology and Microengineering | Mechatronics | Operating Procedures, Materials Treatment | NanotechnologyAdditional physical formats: Printed edition:: No titleOnline resources: Click here to access online In: Springer eBooksItem type | Current library | Call number | Status | Date due | Barcode |
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Ebooks | Mysore University Main Library | Not for loan | EBSP05254254 |
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